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Ana Londergan

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Handbook of Semiconductor Manufacturing Technology

Yoshio Nishi and Robert Doering

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Atomic Layer Deposition Applications 11

F. Roozeboom, S. De Gendt, A. Delabie, J. W. Elam, O. van der Straten and C. Huffman

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Physics and Technology of High-k Gate Dielectrics 4

Samares Kar

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Atomic Layer Deposition Applications 6

J. W. Elam

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Ultra Clean Processing of Silicon Surfaces VII

Paul Mertens, Marc Meuris and Marc Heyns

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Atomic Layer Deposition Applications 2

Ana Londergan

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Atomic Layer Deposition Applications 3

Ana Londergan

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Atomic Layer Deposition Applications 4

Ana Londergan

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