Ion Implantation

Know about the book -

Ion Implantation is written by Mark Goorsky and published by BoD – Books on Demand. It's available with International Standard Book Number or ISBN identification 9535106341 (ISBN 10) and 9789535106340 (ISBN 13).

Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book.