Micro Electronic and Mechanical Systems

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Micro Electronic and Mechanical Systems is written by Kenichi Takahata and published by BoD – Books on Demand. It's available with International Standard Book Number or ISBN identification 9533070277 (ISBN 10) and 9789533070278 (ISBN 13).

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.