Micro and Nano Fabrication
- Hans H. Gatzen
- Volker Saile
- Jürg Leuthold
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Know about the book -
Micro and Nano Fabrication is written by Hans H. Gatzen and published by Springer. It's available with International Standard Book Number or ISBN identification 3662443953 (ISBN 10) and 9783662443958 (ISBN 13).
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
