Predictive Simulation of Semiconductor Processing

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Predictive Simulation of Semiconductor Processing is written by Jarek Dabrowski and published by Springer Science & Business Media. It's available with International Standard Book Number or ISBN identification 3662094320 (ISBN 10) and 9783662094327 (ISBN 13).

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.