Wafer Fabrication(English, Electronic book text, Zhang Jie)

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Wafer Fabrication(English, Electronic book text, Zhang Jie) is written by Zhang Jie and published by De Gruyter. It's available with International Standard Book Number or ISBN identification 3110487470 (ISBN 10) and 9783110487473 (ISBN 13).

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.