Ultra Clean Processing of Semiconductor Surfaces X

Ultra Clean Processing of Semiconductor Surfaces X

  • Paul Mertens
  • Marc Meuris
  • Marc Heyns
Publisher:Trans Tech Publications LtdISBN 13: 9783038137009ISBN 10: 3038137006

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Ultra Clean Processing of Semiconductor Surfaces X is written by Paul Mertens and published by Trans Tech Publications Ltd. It's available with International Standard Book Number or ISBN identification 3038137006 (ISBN 10) and 9783038137009 (ISBN 13).

Selected, peer reviewed papers from the 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 20-22, 2010, Ostend, Belgium

Paul Mertens

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