Atomic Layer Deposition Applications 14

Atomic Layer Deposition Applications 14

  • F. Roozeboom
  • S. De Gendt
  • J. W. Elam
  • J. Dendooven
  • O. van der Straten
  • C. Liu
  • A. Illiberi
Publisher:The Electrochemical SocietyISBN 13: 9781607688525ISBN 10: 1607688522

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Know about the book -

Atomic Layer Deposition Applications 14 is written by F. Roozeboom and published by The Electrochemical Society. It's available with International Standard Book Number or ISBN identification 1607688522 (ISBN 10) and 9781607688525 (ISBN 13).