Atomic Layer Deposition Applications 13

Atomic Layer Deposition Applications 13

  • F. Roozeboom
  • S. De Gendt
  • J. W. Elam
  • O. van der Straten
  • J. Dendooven
  • C. Liu
Publisher:The Electrochemical SocietyISBN 13: 9781607688204ISBN 10: 1607688204

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Know about the book -

Atomic Layer Deposition Applications 13 is written by F. Roozeboom and published by The Electrochemical Society. It's available with International Standard Book Number or ISBN identification 1607688204 (ISBN 10) and 9781607688204 (ISBN 13).