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Atomic Layer Deposition Applications 5 is written by S. de Gendt and published by The Electrochemical Society. It's available with International Standard Book Number or ISBN identification 1566777410 (ISBN 10) and 9781566777414 (ISBN 13).
Atomic Layer Deposition can enable precise deposition of ultra-thin, highly conformal coatings over complex 3D topography, with controlled composition and properties for a wide range of applications.