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Microelectronics Technology and Devices--SBMICRO 2007 is written by João Antonio Martino and published by The Electrochemical Society. It's available with International Standard Book Number or ISBN identification 1566775655 (ISBN 10) and 9781566775656 (ISBN 13).
The SBMicro symposium is a forum dedicated to fabrication and modeling of Microsystems, integrated circuits and devices. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators, and MEMS. This issue contains the papers presented at the 2007 conference.