High Purity Silicon 9
- Cor L. Claeys
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Know about the book -
High Purity Silicon 9 is written by Cor L. Claeys and published by The Electrochemical Society. It's available with International Standard Book Number or ISBN identification 1566775043 (ISBN 10) and 9781566775045 (ISBN 13).
This issue discusses the latest developments in the growth, characterization, device processing and applications of high-purity silicon in either bulk or epitaxial form. Information is given on the control and prevention of impurity incorporation, characterization and detection of defects and impurity states. Device and circuit aspects are also covered. Advanced substrates such as SOI, strained Si and germanium-on-insulator are discussed.
