Electrochemical Processing in ULSI Fabrication III
- Panayotis C. Andricacos
- Electrochemical Society. Electrodeposition Division
- Electrochemical Society. Dielectric Science and Technology Division
- Electrochemical Society. Electronics Division
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Know about the book -
Electrochemical Processing in ULSI Fabrication III is written by Panayotis C. Andricacos and published by The Electrochemical Society. It's available with International Standard Book Number or ISBN identification 1566772737 (ISBN 10) and 9781566772730 (ISBN 13).
"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.
