Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

  • Vikram J. Kapoor
  • William D. Brown
Publisher:The Electrochemical SocietyISBN 13: 9781566770484ISBN 10: 1566770483

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Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films is written by Vikram J. Kapoor and published by The Electrochemical Society. It's available with International Standard Book Number or ISBN identification 1566770483 (ISBN 10) and 9781566770484 (ISBN 13).