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Materials Processing by Cluster Ion Beams is written by Isao Yamada and published by CRC Press. It's available with International Standard Book Number or ISBN identification 1498711766 (ISBN 10) and 9781498711760 (ISBN 13).
Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book:Offers an overview of ion beam technologies, f