Ultra-Clean Technology Handbook
- Tadahiro Ohmi
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Know about the book -
Ultra-Clean Technology Handbook is written by Tadahiro Ohmi and published by CRC Press. It's available with International Standard Book Number or ISBN identification 1351406434 (ISBN 10) and 9781351406437 (ISBN 13).
Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules.
