Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

  • Danelle Mary Tanner
  • Rajeshuni Ramesham
Publisher:SPIE-International Society for Optical EngineeringISBN 13: 9780819456908ISBN 10: 081945690X

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Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV is written by Danelle Mary Tanner and published by SPIE-International Society for Optical Engineering. It's available with International Standard Book Number or ISBN identification 081945690X (ISBN 10) and 9780819456908 (ISBN 13).

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.