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Semiconductor Industrial Hygiene Handbook is written by David G. Baldwin and published by William Andrew. It's available with International Standard Book Number or ISBN identification 0815518978 (ISBN 10) and 9780815518976 (ISBN 13).
This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.