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Semiconductor Devices is written by Simon M. Sze and published by Wiley. It's available with International Standard Book Number or ISBN identification 0471333727 (ISBN 10) and 9780471333722 (ISBN 13).
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.