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Introduction to Microfabrication is written by Sami Franssila and published by John Wiley & Sons. It's available with International Standard Book Number or ISBN identification 0470851066 (ISBN 10) and 9780470851067 (ISBN 13).
Nanotechnology and microengineering are among the top priority research areas for the US and Europe. This text provides coverage of all aspects of the attempt to build functional devices at a molecular size.