MEMS Materials and Processes Handbook

Know about the book -

MEMS Materials and Processes Handbook is written by Reza Ghodssi and published by Springer Science & Business Media. It's available with International Standard Book Number or ISBN identification 0387473181 (ISBN 10) and 9780387473185 (ISBN 13).

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.