Rapid Thermal Processing

Know about the book -

Rapid Thermal Processing is written by Richard B. Fair and published by Academic Press. It's available with International Standard Book Number or ISBN identification 0323139809 (ISBN 10) and 9780323139809 (ISBN 13).

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.