Handbook of Silicon Semiconductor Metrology

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Handbook of Silicon Semiconductor Metrology is written by Alain C. Diebold and published by CRC Press. It's available with International Standard Book Number or ISBN identification 0203904540 (ISBN 10) and 9780203904541 (ISBN 13).

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay