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S. de Gendt

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Advanced Semiconductor-on-Insulator Technology and Related Physics 15

Advanced Semiconductor-on-Insulator Technology and Related Physics 15

Yasuhisa Omura

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Dielectric Films for Advanced Microelectronics

Dielectric Films for Advanced Microelectronics

Mikhail Baklanov, Karen Maex and Martin Green

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Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes

Bernd O. Kolbesen

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Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10

Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10

R. Ekwal Sah

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Cleaning Technology in Semiconductor Device Manufacturing VIII

Cleaning Technology in Semiconductor Device Manufacturing VIII

Jerzy Rużyłło

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Ultra Clean Processing of Silicon Surfaces IV

Ultra Clean Processing of Silicon Surfaces IV

Marc Heyns, Marc Meuris and Paul Mertens

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Ultra Clean Processing of Silicon Surfaces VII

Ultra Clean Processing of Silicon Surfaces VII

Paul Mertens, Marc Meuris and Marc Heyns

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Ultra Clean Processing of Silicon Surfaces VI

Ultra Clean Processing of Silicon Surfaces VI

Marc Heyns, Paul Mertens and Marc Meuris

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Advances in Materials and Technologies

Advances in Materials and Technologies

Ramya Muthusamy, Thangaprakash Sengodan, Vladimir Khovaylo, Nguyen Quang Liem and Takahiro Ohashi

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