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Alain Diebold

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Semiconductor Material and Device Characterization

Semiconductor Material and Device Characterization

Dieter K. Schroder

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Advanced Interconnects for ULSI Technology

Advanced Interconnects for ULSI Technology

Mikhail Baklanov, Paul S. Ho and Ehrenfried Zschech

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Guide to State-of-the-Art Electron Devices

Guide to State-of-the-Art Electron Devices

Joachim N. Burghartz

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Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Richard E. Novak and Jerzy Rużyłło

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Materials for Information Technology

Materials for Information Technology

Ehrenfried Zschech, Caroline Whelan and Thomas Mikolajick

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High Dielectric Constant Materials

High Dielectric Constant Materials

Howard Huff and David Gilmer

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Semiconductor Silicon 2002

Semiconductor Silicon 2002

Howard R. Huff, László Fábry and Seigo Kishino

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